Sensor head unit

Microscope optics for best   lateral resolution with spot size<4 μm
  Integrated LED sample illumination

Front-End unit /
  Data management system

Installed in a system   cabinet for 19” electrical equipment:
  MSA-F-100-3D Vibrometer front end with digital decoder technology
  MSA-W-100-3D Data Management System

Stand (optional)

Rigid stand for interfacing   the sensor head unit to an optical table or breadboard,
  incl. focus block with 100 mm travel range for traversing the sensor head   unit in the Z axis

Prober compatibility

Compatible to manual,   automatic and vacuum probestations

xy Stage

Manual stage (optional)

A-PST-200P XY Precision   Positioning Stage:
  Travel range: 200 mm x 200 mm
  Tip/tilt adjustment
  Bi-directional repeatability: +/- 0.5 µm
  Load capacity: 10 kg

Software

VibSoft-1004 Software   Package for data acquisition and analysis

PSV Scanning Vibrometer   Software for data acquisition and analysis

Sensor Head Unit

Configuration

Single measurement beam,   three direction sensitive detectors

Laser source

DPSS, 532 nm, visible green   laser beam

Laser output power

<5 mW visible output   power

Laser safety class

Class 2M

Stand-off distance

36,7 mm

Spot diameter

<4 µm

Depth of focus

±10 µm

Weight

12.5 kg

Camera

Two integrated digital   cameras for displaying measurement and large overview area
  MAIN (measurement area): field of view (mm²) = 0.94 x 0.71, resolution (px) =   1,296 x 966
  AUX (overview area): field of view (mm²) = 3.7 x 2.7, resolution (px) =782 x   582

Front-End Configurations

MSA-100-3D-H

MSA-100-3D-M

MSA-100-3D-V

fmax

100 kHz

2.5 MHz

25 MHz

Number of ranges

13 velocity ranges

13 velocity ranges

13 velocity ranges

vmax

0.01    m/s … 10 m/s,

range dependent

0.001 m/s  … 10 m/s,

range dependent

0.001 m/s  … 10 m/s, range dependent

Velocity resolution, average   value

0.01 (µm/s)/√Hz … 0.02 (µm/s)/√Hz range dependent,   frequency dependent

0.005 (µm/s)/√Hz … 1 (µm/s)/√Hz range dependent,   frequency dependent

0.005 (µm/s)/√Hz …. 2 (µm/s)/√Hz range dependent,   frequency dependent

General Specifications

Power consumption

100 VAC ... 240 VAC ±10%,   50/60 Hz; overall max. 825 W

Environmental conditions

Operating temperature: +18   °C ... +28 °C (64.4 °F ... 82.4 °F);
Storage temperature: –10 °C ... +65 °C (14 °F ... 149 °F); 

Relative humidity:   max. 80%, non-condensing