The Micro System Analyzer is the premier measurement tool for  the analysis and visualization of structural vibrations and surface  topography in micro structures such as MEMS. By fully integrating a  microscope with scanning laser doppler vibrometry, stroboscopic video microscopy and scanning white light  interferometry, the Micro System Analyzer is designed with an all-in-one  combination of technologies that clarifies real microstructural response and  topography.



Optical Unit

The MSA Optical Unit is offered in six configurations that allow individual  or combined in-plane measurements, out-of-plane measurements or topography  measurements. Depending on system type, the optical unit comprises the head with microscope optics as well as a single-point or differential fiber optic interferometer. In all  configurations, the Sensor Head has optimized microscope optics, an  integrated LED illumination unit and a progressive scan video camera which  provides a live video stream for the Data Management System.

Processing Unit  

The Processing Unit comprises the Data Management System with MSA  Software, the Junction Box and, in system configurations that  include vibrometry, the Vibrometer Controller.


The Software comprises the different programs for data acquisition and  evaluation:
•Scanning Vibrometer software for out-of-plane measurements  offers quick and easy set up, simple data acquisition and outstanding 3D  data visualization.
•Planar Motion Analysis software similarly controls the in-plane  measurement process and provides a dynamic visualization.
•Topography Measurement System Software for data acquisition,  analysis, 2D and 3D data representation, including profile cuts.


The Micro System Analyzer can be configured to cover many operating  modes and measurement ranges needed to characterize microstructures. The  following table helps to match the appropriate system to the application.   we provides systems for either single-task or combined measurements. For  out-of-plane vibration measurements, the system can be configured for either  single-beam or differential operation. Differential systems can perform both  single-beam and differential measurements. In addition to the standard 1.5  MHz version, there is a 24 MHz option that features both high-frequency data  acquisition and a high-frequency waveform generator.



Award-Winning Micro System Analyzer

Incorporated in the MEMS design and test cycle, we provides  precise 3D dynamic and static response data that simplifies troubleshooting,  enhances and shortens design cycles, improves yield and performance, and  reduces product cost. This outstanding degree of innovation has been  recognized by two prestigious awards: the 2005 Sensor Innovation Award and  the Photonics Circle of Excellence for the development of microscope-based  scanning vibrometry.

Superior Dynamic Characterization Compared to Single Technology Solutions

The combination of two complementary measurement techniques for  investigating the vibrational behavior of small structures provides superior  performance. For example, it can quickly identify, visualize and measure  system resonances and transient responses, enhancing overall measurement  productivity. This improved efficiency is especially important when  integrating the measurement system into automated processes for MEMS  production environments. Single-technology solutions like ESPI, white light  interferometry, and phase-shifting interferometry give a much more limited  view of small structure response.

Finds All Mechanical Resonances Without Prior Information

Using wide-band excitation, the highly sensitive laser-Doppler technique  can rapidly find all mechanical resonances (in-plane and out-of-plane)  without prior information. In a second step, stroboscopic video microscopy is  used to obtain accurate amplitude and phase information of in-plane  resonances identified through laser vibrometry.


The All-in-One Solution - Superior Integration  of Technologies
•Rapid identification and visualization of both system resonances and  static topography
•Integrated microscope optics with optimized optical path for best lateral  resolution and highest image quality
•Easy integration with MEMS/wafer probe stations
•Simple and intuitive operation, ready to measure within minutes
•Increased productivity through short measurement cycle
•Accelerates product development, troubleshooting and time-to-market

Scanning Laser-Doppler Vibrometry for the  Measurement of Out-of-Plane Vibrations
•Full-field vibration mapping and broadband, out-of-plane frequency  response information
•Displays frequency-domain and time-domain data, simplifying transient  response analysis
•High-density sample grids with up to 512 x 512 user-defined measurement  points
•Versatile data import and export interfaces to validate FE models
•Submicron laser spot for measuring very small structures and details
•Laser dimmer for optimized measurement conditions

Stroboscopic Video Microscopy for In-Plane Motion Detection
•Stroboscopic video measurement of in-plane motion with frequencies up to 1  MHz
•Time-domain displacement measurements with nanometer resolution
•Integrated signal generator for step-response, ring-down and Bode plot  measurements
•Time-saving, automatic multiband processing

White Light Interferometry for the Acquisition of Topography Data
•Rapid, non-contact 3D topography measurement with subnanometer resolution
•Determination of structure heights and shape on both rough and specular  surfaces
•Overlay technique copes with different contrast levels and material mixes
•Powerful TMS software for topography and surface characterization

•2D and 3D presentation with video overlay



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