UHF-120高频显微激光测振仪
UHF-120 超高频激光测振仪的显著特点是其具有极大的测量带宽，可高分辨率对高达 2.4 GHz 的面外振动进行全场分析。UHF-120具有小于1μm的高横向分辨率，这尤其对声表面波 (SAW) 分量的表面波可视化起决定性作用。另一个应用涉及验证体声波 (BAW) 分量和超高频率范围内超声换能器成像。
UHF-120测量结果包含大带宽范围内的振动信息，可一次性快速地识别谐振频率。通过安装在软件控制的高精度xy 工作台的样品移动，完成全场测量。
光学振动测量，对样品没有任何附加质量影响
高达 2.4 GHz 的超声频振动分析
详细显示振型
高振幅分辨率
适应性激光功率，保护敏感样品和表面
高横向分辨率，用于测量短波长
兼容普通 MEMS 探针站
Next generation micro- and nanotechnology devices such as micro-acoustic filters, RF-MEMS and ultrasonic transducers involve high frequency mechanical vibration and wave propagation approaching GHz frequencies. For microscopic devices operating at these frequencies only sophisticated optical techniques can provide the spatial resolution, zero mass loading and vibration sensitivity required for proper characterization.
UHF-120 Ultra High Frequency Vibrometer captures real-time, out-of-plane motions of micro devices with picometer sensitivity and a measurement bandwidth of up to 2.4 GHz. Options provide for either a manual point-by-point system (VibSoft) or an automated scanning system (PSV Soft) capturing and analyzing deflection shapes.
Technical data | ||||||
Metrological specifications | ||||||
Max. vibration frequency | 600 MHz | 1.2 GHz (optional) | 2.4 GHz (optional) | |||
Maximum measurement time | 3.906 ms | 3.906 ms | 1.963 ms | |||
Max. sample rate | 40 GSa/s | |||||
Amplitude resolution of UHF-A-120 | 8 bit | |||||
Displacement-amplitude resolution | 1.5 pm at 2.5 kHz resolution bandwidth (corresponds to 30 fm/√(Hz)) | |||||
Max. number of FFT lines | 2,343,750 | 4,687,500 | 2,343,750 | |||
Best frequency resolution | 256 Hz | 256 Hz | 512 Hz | |||
Number of reference channels | 1 | |||||
Optical specifications | ||||||
Laser type | solid state | |||||
Laser wavelength | 532 nm, visible green beam | |||||
Laser spot diameter | < 2.5 µm (1/e²) 1 | |||||
Laser output | < 5 mW 2 | |||||
Laser protection class | Class 3R | |||||
Camera type | 1/4" CCD color board camera | |||||
Active pixels (H x V) | 510 x 492 | |||||
Illumination | integrated, bright-field | |||||
Objective | 20x microscope objective 3 | |||||
Field of view | 0.71 mm x 0.55 mm (aprox.) | |||||
Working distance | 20 mm | |||||
UHF-120 system configurations | ||||||
UHF-120 | UHF-120-SV | |||||
Vibrometer system | UHF-I-120 Sensor Head | |||||
Data acquisition & | UHF-A-121 LeCroy Oscilloscope and Digitizer | |||||
Software | VibSoft system software | PSV system software | ||||
XY-Stage | manual stage (optional) | A-PST-200P XY Precision Positioning Stage | ||||
Accessories | A-CAB-BAS System Cabinet for 19" electronic components | |||||
UHF-I-120 Sensor Head | ||||||
Dimensions [W x D x H] | 158 x 129 x 376 mm | |||||
Weight | 11.4 kg | |||||
Specification of motion axes | ||||||
XY-Stage | A-SPK-0002 | A-PST-200P XY | ||||
Dimensions [W x D x H] | 161 x 158 x 116 mm | 310 x 310 x 135 mm | ||||
Weight | 1.8 kg | 21.6 kg | ||||
Lateral travel range | 13 mm x 13 mm, manually actuated | 200 mm x 200 mm, motorized | ||||
Repeatability (bi-directional) | N/A | +/- 0.5 µm | ||||
Tip-Tilt range | +/- 2.5°, manually actuated | +/- 2.5°, manually actuated | ||||
Load capacity | 0.9 kg | 10.0 kg | ||||
General specifications | ||||||
Power | 100 VAC… 240 VAC ±10%, 50/60 Hz 500 VA (typical) | |||||
Environmental conditions | Operating temperature: +18 °C … +30 °C (64.4 °F … 86 °C); | |||||
Compliance with standards | ||||||
Electrical safety | Norm1: IEC/EN 61010-1:2011-07 | Norm2: IEC/EN 61326-1:2013-07 | ||||
Emission: FCC Class A, IEC/EN 61000-3-2 and 61000-3-3 | ||||||
Immunity: IEC/EN 61000-4-2 to 61000-4-6 and IEC/EN 61000-4-11 | ||||||
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